Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10466583 | Halftone phase shift mask blank and halftone phase shift mask | Yukio Inazuki, Takuro Kosaka, Hideo Kaneko | 2019-11-05 |
| 10372030 | Halftone phase shift mask blank and halftone phase shift mask | Takuro Kosaka, Yukio Inazuki, Hideo Kaneko | 2019-08-06 |