Issued Patents 2019
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10395361 | Apparatus and methods for inspecting reticles | Mohammad Mehdi Daneshpanah | 2019-08-27 |
| 10304180 | Apparatus and methods for predicting wafer-level defect printability | Rui-fang Shi | 2019-05-28 |
| 10288415 | Critical dimension uniformity monitoring for extreme ultra-violet reticles | Rui-fang Shi, Alex Pokrovskiy, Weston L. Sousa | 2019-05-14 |