Issued Patents 2019
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10288415 | Critical dimension uniformity monitoring for extreme ultra-violet reticles | Rui-fang Shi, Abdurrahman Sezginer, Weston L. Sousa | 2019-05-14 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10288415 | Critical dimension uniformity monitoring for extreme ultra-violet reticles | Rui-fang Shi, Abdurrahman Sezginer, Weston L. Sousa | 2019-05-14 |