Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10451563 | Inspection of photomasks by comparing two photomasks | Yalin Xiong, Carl Hess | 2019-10-22 |
| 10288415 | Critical dimension uniformity monitoring for extreme ultra-violet reticles | Rui-fang Shi, Alex Pokrovskiy, Abdurrahman Sezginer | 2019-05-14 |