Issued Patents 2019
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10401305 | Time-varying intensity map generation for reticles | Carl Hess, Thomas Vavul | 2019-09-03 |
| 10304180 | Apparatus and methods for predicting wafer-level defect printability | Abdurrahman Sezginer | 2019-05-28 |
| 10288415 | Critical dimension uniformity monitoring for extreme ultra-violet reticles | Alex Pokrovskiy, Abdurrahman Sezginer, Weston L. Sousa | 2019-05-14 |
| 10168273 | Methods and apparatus for polarizing reticle inspection | Haifeng Huang, Damon F. Kvamme, Amrish Kelkar | 2019-01-01 |