Issued Patents 2019
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10437143 | Pellicle for exposure to extreme ultraviolet light, photomask assembly, and method of manufacturing the pellicle | Hwan Chul Jeon, Sung Won Kwon, Hee-Bom Kim, Chang-Young Jeong | 2019-10-08 |
| 10394117 | Pellicle film including graphite-containing thin film for extreme ultraviolet lithography | Ji-Beom Yoo, Seul Gi Kim, Sang-Jin Cho, Myung-shik Chang, Jang-dong You | 2019-08-27 |
| 10345698 | Method for fabricating semiconductor device | Ji-Beom Yoo, Sung Won Kwon, Dong Wook Shin, Jin Su Kim, Hwan Chul Jeon | 2019-07-09 |