Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10394117 | Pellicle film including graphite-containing thin film for extreme ultraviolet lithography | Mun Ja Kim, Seul Gi Kim, Sang-Jin Cho, Myung-shik Chang, Jang-dong You | 2019-08-27 |
| 10345698 | Method for fabricating semiconductor device | Sung Won Kwon, Dong Wook Shin, Mun Ja Kim, Jin Su Kim, Hwan Chul Jeon | 2019-07-09 |