Issued Patents 2019
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10437143 | Pellicle for exposure to extreme ultraviolet light, photomask assembly, and method of manufacturing the pellicle | Hwan Chul Jeon, Mun Ja Kim, Sung Won Kwon, Hee-Bom Kim | 2019-10-08 |