Issued Patents 2019
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10504686 | Charged particle beam writing method and charged particle beam writing apparatus | Munehiro Ogasawara | 2019-12-10 |
| 10224171 | Blanking device for multi charged particle beams, and multi charged particle beam irradiation apparatus | Hiroshi Matsumoto, Munehiro Ogasawara, Hirofumi Morita | 2019-03-05 |
| 10192712 | Charged particle beam writing apparatus, method of adjusting beam incident angle to target object surface, and charged particle beam writing method | Takahito Nakayama | 2019-01-29 |