Issued Patents 2019
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10388488 | Multi charged particle beam drawing apparatus and multi charged particle beam drawing method | Osamu Iizuka, Tsubasa NANAO | 2019-08-20 |
| 10224171 | Blanking device for multi charged particle beams, and multi charged particle beam irradiation apparatus | Takanao Touya, Hiroshi Matsumoto, Munehiro Ogasawara | 2019-03-05 |
| 10224172 | Multi-beam optical system adjustment method, and multi-beam exposure apparatus | Munehiro Ogasawara | 2019-03-05 |