Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10490388 | Multibeam-focus adjusting method, multibeam-focus measuring method, and charged-particle-beam lithography apparatus | — | 2019-11-26 |
| 10388488 | Multi charged particle beam drawing apparatus and multi charged particle beam drawing method | Hirofumi Morita, Osamu Iizuka | 2019-08-20 |