Issued Patents 2019
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10504686 | Charged particle beam writing method and charged particle beam writing apparatus | Takanao Touya | 2019-12-10 |
| 10451976 | Electron beam irradiation apparatus and electron beam dynamic focus adjustment method | — | 2019-10-22 |
| RE47561 | Multi charged particle beam writing method and multi charged particle beam writing apparatus | Ryoichi Yoshikawa | 2019-08-06 |
| 10283316 | Aperture for inspecting multi beam, beam inspection apparatus for multi beam, and multi charged particle beam writing apparatus | Hiroshi Yamashita | 2019-05-07 |
| 10224171 | Blanking device for multi charged particle beams, and multi charged particle beam irradiation apparatus | Takanao Touya, Hiroshi Matsumoto, Hirofumi Morita | 2019-03-05 |
| 10224172 | Multi-beam optical system adjustment method, and multi-beam exposure apparatus | Hirofumi Morita | 2019-03-05 |