Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10460902 | Charged particle beam writing apparatus and method for diagnosing failure of blanking circuit | — | 2019-10-29 |
| 10192712 | Charged particle beam writing apparatus, method of adjusting beam incident angle to target object surface, and charged particle beam writing method | Takanao Touya | 2019-01-29 |