Issued Patents 2019
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10407772 | Shower head, vapor phase growth apparatus, and vapor phase growth method | Takumi YAMADA, Yuusuke Sato | 2019-09-10 |
| 10385474 | Vapor phase growth apparatus and vapor phase growth method | Yuusuke Sato, Hideki Ito, Takanori HAYANO | 2019-08-20 |
| 10351949 | Vapor phase growth method | Kiyotaka Miyano, Masayuki TSUKUI, Hajime Nago, Yasushi Iyechika | 2019-07-16 |
| 10287707 | Film growth apparatus, film growth method and maintenance method of film growth apparatus | Yoshitaka Ishikawa | 2019-05-14 |