Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10508363 | Vapor phase growth apparatus having substrate holder with ring-shaped protrusion | Takashi Haraguchi | 2019-12-17 |
| 10407772 | Shower head, vapor phase growth apparatus, and vapor phase growth method | Yuusuke Sato, Hideshi TAKAHASHI | 2019-09-10 |