Issued Patents 2019
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10407772 | Shower head, vapor phase growth apparatus, and vapor phase growth method | Takumi YAMADA, Hideshi TAKAHASHI | 2019-09-10 |
| 10385474 | Vapor phase growth apparatus and vapor phase growth method | Hideshi TAKAHASHI, Hideki Ito, Takanori HAYANO | 2019-08-20 |
| 10237917 | Heater and apparatus for manufacturing semiconductor device using heater | Hiroshi Furutani, Kunihiko Suzuki | 2019-03-19 |