Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10287707 | Film growth apparatus, film growth method and maintenance method of film growth apparatus | Hideshi TAKAHASHI | 2019-05-14 |
| 10204819 | Vapor phase growth apparatus and ring-shaped holder having a curved mounting surface with convex and concave regions | Yasushi Iyechika, Masayuki TSUKUI | 2019-02-12 |