Issued Patents 2019
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10495977 | Spatial light modulator, exposure apparatus, and method for manufacturing device | Soichi Owa, Yoji Watanabe | 2019-12-03 |
| 10461039 | Mark, method for forming same, and exposure apparatus | Yuji Shiba, Nobutaka Magome | 2019-10-29 |
| 10338472 | Mark forming method and device manufacturing method | — | 2019-07-02 |
| 10338479 | Spatial light modulator, method of driving same, and exposure method and apparatus | Yoji Watanabe, Soichi Owa | 2019-07-02 |
| 10317346 | Method and device for inspecting spatial light modulator, and exposure method and device | — | 2019-06-11 |
| 10236259 | Mark, method for forming same, and exposure apparatus | Yuji Shiba, Nobutaka Magome | 2019-03-19 |
| 10222705 | Spatial light modulator, exposure apparatus, and method for manufacturing device | Soichi Owa, Yoji Watanabe | 2019-03-05 |