Issued Patents 2019
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10461039 | Mark, method for forming same, and exposure apparatus | Yuji Shiba, Tomoharu Fujiwara | 2019-10-29 |
| 10236259 | Mark, method for forming same, and exposure apparatus | Yuji Shiba, Tomoharu Fujiwara | 2019-03-19 |
| 10185232 | Exposure apparatus, method for producing device, and method for controlling exposure apparatus | Naoyuki Kobayashi | 2019-01-22 |