Issued Patents 2019
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10461039 | Mark, method for forming same, and exposure apparatus | Tomoharu Fujiwara, Nobutaka Magome | 2019-10-29 |
| 10354959 | Mark forming method, mark detecting method, and device manufacturing method using self-assembled block copolymer | — | 2019-07-16 |
| 10236259 | Mark, method for forming same, and exposure apparatus | Tomoharu Fujiwara, Nobutaka Magome | 2019-03-19 |