Issued Patents 2019
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10495977 | Spatial light modulator, exposure apparatus, and method for manufacturing device | Soichi Owa, Tomoharu Fujiwara | 2019-12-03 |
| 10338479 | Spatial light modulator, method of driving same, and exposure method and apparatus | Soichi Owa, Tomoharu Fujiwara | 2019-07-02 |
| 10222700 | Method for forming pattern and method for producing device | — | 2019-03-05 |
| 10222705 | Spatial light modulator, exposure apparatus, and method for manufacturing device | Soichi Owa, Tomoharu Fujiwara | 2019-03-05 |