Issued Patents 2019
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10241417 | Polarization-modulating element, illumination optical apparatus, exposure apparatus, and exposure method | Koji Shigematsu, Hiroyuki Hirota, Tomoyuki Matsuyama | 2019-03-26 |
| 10234770 | Polarization-modulating element, illumination optical apparatus, exposure apparatus, and exposure method | Koji Shigematsu, Hiroyuki Hirota, Tomoyuki Matsuyama | 2019-03-19 |
| 10203496 | Spatial light modulator unit, illumination optical system, exposure device, and device manufacturing method | — | 2019-02-12 |
| 10175583 | Illumination optical system, exposure apparatus, device production method, and light polarization unit | Hirohisa Tanaka, Kinya Kato, Takashi Mori | 2019-01-08 |