Issued Patents 2019
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10520825 | Illumination optical system, exposure apparatus and device manufacturing method | — | 2019-12-31 |
| 10241417 | Polarization-modulating element, illumination optical apparatus, exposure apparatus, and exposure method | Osamu Tanitsu, Hiroyuki Hirota, Tomoyuki Matsuyama | 2019-03-26 |
| 10234770 | Polarization-modulating element, illumination optical apparatus, exposure apparatus, and exposure method | Osamu Tanitsu, Hiroyuki Hirota, Tomoyuki Matsuyama | 2019-03-19 |
| 10168620 | Illumination optical system, exposure apparatus and device manufacturing method | — | 2019-01-01 |