Issued Patents 2019
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10241417 | Polarization-modulating element, illumination optical apparatus, exposure apparatus, and exposure method | Osamu Tanitsu, Koji Shigematsu, Tomoyuki Matsuyama | 2019-03-26 |
| 10234770 | Polarization-modulating element, illumination optical apparatus, exposure apparatus, and exposure method | Osamu Tanitsu, Koji Shigematsu, Tomoyuki Matsuyama | 2019-03-19 |
| 10166842 | Air-conditioning grill installation structure and air-conditioning grill installation method | — | 2019-01-01 |