Issued Patents 2019
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10353294 | Illumination optical assembly, exposure device, and device manufacturing method | Norio Miyake | 2019-07-16 |
| 10175583 | Illumination optical system, exposure apparatus, device production method, and light polarization unit | Osamu Tanitsu, Hirohisa Tanaka, Takashi Mori | 2019-01-08 |