Issued Patents 2019
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10353294 | Illumination optical assembly, exposure device, and device manufacturing method | Kinya Kato | 2019-07-16 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10353294 | Illumination optical assembly, exposure device, and device manufacturing method | Kinya Kato | 2019-07-16 |