Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10359701 | Material for forming underlayer film for lithography, composition for forming underlayer film for lithography, underlayer film for lithography and pattern forming method | Kana OKADA, Takashi MAKINOSHIMA, Masatoshi Echigo, Atsushi Okoshi | 2019-07-23 |
| 10338471 | Composition for forming underlayer film for lithography, underlayer film for lithography and pattern forming method | Kana OKADA, Takashi MAKINOSHIMA, Masatoshi Echigo, Atsushi Okoshi | 2019-07-02 |