Issued Patents 2019
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10395944 | Pulsing RF power in etch process to enhance tungsten gapfill performance | Waikit Fung, Liang Meng | 2019-08-27 |
| 10381266 | Tungsten feature fill with nucleation inhibition | Tsung-Han Yang, Jasmine Lin | 2019-08-13 |
| 10256142 | Tungsten feature fill with nucleation inhibition | Esther Jeng, Raashina Humayun, Michal Danek, Juwen Gao, Deqi Wang | 2019-04-09 |
| 10211099 | Chamber conditioning for remote plasma process | Deqi Wang, Gang Liu, Tsung-Han Yang, John W. Griswold | 2019-02-19 |
| 10199267 | Tungsten nitride barrier layer deposition | Rohit Khare, Jasmine Lin | 2019-02-05 |
| 10170320 | Feature fill with multi-stage nucleation inhibition | Deqi Wang, Raashina Humayun, Michal Danek | 2019-01-01 |