Issued Patents 2019
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10395944 | Pulsing RF power in etch process to enhance tungsten gapfill performance | Waikit Fung, Anand Chandrashekar | 2019-08-27 |
LM
Liang Meng
Overall (2019): #371,476 of 560,194Top 70%
1
Patents 2019