Issued Patents 2019
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10256142 | Tungsten feature fill with nucleation inhibition | Anand Chandrashekar, Esther Jeng, Raashina Humayun, Michal Danek, Juwen Gao | 2019-04-09 |
| 10211099 | Chamber conditioning for remote plasma process | Gang Liu, Anand Chandrashekar, Tsung-Han Yang, John W. Griswold | 2019-02-19 |
| 10170320 | Feature fill with multi-stage nucleation inhibition | Anand Chandrashekar, Raashina Humayun, Michal Danek | 2019-01-01 |