Issued Patents 2019
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10465289 | Zirconium, hafnium, titanium precursors and deposition of group 4 containing films using the same | Daehyeon Kim, Wontae Noh, Julien Gatineau, Jean-Marc Girard | 2019-11-05 |
| 10364259 | Zirconium, hafnium, titanium precursors and deposition of group 4 containing films using the same | Daehyeon Kim, Wontae Noh, Julien Gatineau, Jean-Marc Girard | 2019-07-30 |
| 10337104 | Zirconium, hafnium, titanium precursors and deposition of group 4 containing films using the same | Wontae Noh, Daehyeon Kim, Julien Gatineau, Jean-Marc Girard | 2019-07-02 |
| 10309010 | Cobalt-containing compounds, their synthesis, and use in cobalt-containing film deposition | Changhee Ko, Jean-Marc Girard, Julien Gatineau | 2019-06-04 |
| 10287175 | Method for purification and storage of Til4 for Ti-containing film deposition | Grigory Nikiforov | 2019-05-14 |