Issued Patents 2019
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10465289 | Zirconium, hafnium, titanium precursors and deposition of group 4 containing films using the same | Satoko Gatineau, Daehyeon Kim, Wontae Noh, Jean-Marc Girard | 2019-11-05 |
| 10364259 | Zirconium, hafnium, titanium precursors and deposition of group 4 containing films using the same | Daehyeon Kim, Satoko Gatineau, Wontae Noh, Jean-Marc Girard | 2019-07-30 |
| 10337104 | Zirconium, hafnium, titanium precursors and deposition of group 4 containing films using the same | Satoko Gatineau, Wontae Noh, Daehyeon Kim, Jean-Marc Girard | 2019-07-02 |
| 10309010 | Cobalt-containing compounds, their synthesis, and use in cobalt-containing film deposition | Satoko Gatineau, Changhee Ko, Jean-Marc Girard | 2019-06-04 |