Issued Patents 2019
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10501484 | Amine substituted trisilylamine and tridisilylamine compounds and synthesis methods thereof | Antonio Sanchez, Gennadiy Itov, Manish Khandelwal, Matthew Damien Stephens, Peng Zhang | 2019-12-10 |
| 10465289 | Zirconium, hafnium, titanium precursors and deposition of group 4 containing films using the same | Satoko Gatineau, Daehyeon Kim, Wontae Noh, Julien Gatineau | 2019-11-05 |
| 10403494 | Si-containing film forming precursors and methods of using the same | Peng Zhang, Antonio Sanchez, Manish Khandelwal, Gennadiy Itov, Reno Pesaresi | 2019-09-03 |
| 10384944 | Preparation of Si—H containing iodosilanes via halide exchange reaction | Cole J. Ritter, III, Gennadiy Itov, Manish Khandelwal, Glenn Kuchenbeiser, Sean Kerrigan +3 more | 2019-08-20 |
| 10364259 | Zirconium, hafnium, titanium precursors and deposition of group 4 containing films using the same | Daehyeon Kim, Satoko Gatineau, Wontae Noh, Julien Gatineau | 2019-07-30 |
| 10337104 | Zirconium, hafnium, titanium precursors and deposition of group 4 containing films using the same | Satoko Gatineau, Wontae Noh, Daehyeon Kim, Julien Gatineau | 2019-07-02 |
| 10309010 | Cobalt-containing compounds, their synthesis, and use in cobalt-containing film deposition | Satoko Gatineau, Changhee Ko, Julien Gatineau | 2019-06-04 |
| 10294110 | Pentachlorodisilane production method and pentachlorodisilane produced by same | Hiroyuki Yashima, Takahiro Kozuka, Seiichi Terasaki | 2019-05-21 |
| 10192734 | Short inorganic trisilylamine-based polysilazanes for thin film deposition | Antonio Sanchez, Gennadiy Itov, Reno Pesaresi, Peng Zhang, Manish Khandelwal | 2019-01-29 |