Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10403494 | Si-containing film forming precursors and methods of using the same | Jean-Marc Girard, Peng Zhang, Antonio Sanchez, Manish Khandelwal, Gennadiy Itov | 2019-09-03 |
| 10192734 | Short inorganic trisilylamine-based polysilazanes for thin film deposition | Antonio Sanchez, Gennadiy Itov, Jean-Marc Girard, Peng Zhang, Manish Khandelwal | 2019-01-29 |