Issued Patents 2019
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10287175 | Method for purification and storage of Til4 for Ti-containing film deposition | Satoko Gatineau | 2019-05-14 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10287175 | Method for purification and storage of Til4 for Ti-containing film deposition | Satoko Gatineau | 2019-05-14 |