Issued Patents 2019
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10510519 | Plasma processing apparatus and data analysis apparatus | Kenji Tamaki, Akira Kagoshima, Daisuke Shiraishi, Masahiro Sumiya | 2019-12-17 |
| 10408762 | Plasma processing apparatus, plasma processing method and plasma processing analysis method | Kenji Tamaki, Daisuke Shiraishi, Akira Kagoshima, Satomi Inoue | 2019-09-10 |
| 10262842 | Analysis method and semiconductor etching apparatus | Kenji Tamaki, Akira Kagoshima, Daisuke Shiraishi | 2019-04-16 |