Issued Patents 2019
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10510519 | Plasma processing apparatus and data analysis apparatus | Ryoji Asakura, Kenji Tamaki, Daisuke Shiraishi, Masahiro Sumiya | 2019-12-17 |
| 10408762 | Plasma processing apparatus, plasma processing method and plasma processing analysis method | Ryoji Asakura, Kenji Tamaki, Daisuke Shiraishi, Satomi Inoue | 2019-09-10 |
| 10262840 | Plasma processing apparatus | Daisuke Shiraishi, Satomi Inoue, Shigeru Nakamoto, Shoji Ikuhara, Toshihiro Morisawa | 2019-04-16 |
| 10262842 | Analysis method and semiconductor etching apparatus | Ryoji Asakura, Kenji Tamaki, Daisuke Shiraishi | 2019-04-16 |
| 10184182 | Plasma processing apparatus | Daisuke Shiraishi, Yuji Nagatani | 2019-01-22 |