Issued Patents 2019
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10453695 | Plasma processing apparatus and plasma processing method | Soichiro Eto, Takeshi Ohmori, Tatehito Usui | 2019-10-22 |
| 10408762 | Plasma processing apparatus, plasma processing method and plasma processing analysis method | Ryoji Asakura, Kenji Tamaki, Daisuke Shiraishi, Akira Kagoshima | 2019-09-10 |
| 10262840 | Plasma processing apparatus | Akira Kagoshima, Daisuke Shiraishi, Shigeru Nakamoto, Shoji Ikuhara, Toshihiro Morisawa | 2019-04-16 |