Issued Patents 2019
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10510519 | Plasma processing apparatus and data analysis apparatus | Ryoji Asakura, Kenji Tamaki, Akira Kagoshima, Daisuke Shiraishi | 2019-12-17 |
| 10490412 | Method for releasing sample and plasma processing apparatus using same | Masaki Ishiguro, Shigeru Shirayone, Tomoyuki Tamura, Kazuyuki Ikenaga | 2019-11-26 |
| 10395935 | Plasma processing apparatus and plasma processing method | Masaki Ishiguro, Shigeru Shirayone, Kazuyuki Ikenaga, Tomoyuki Tamura | 2019-08-27 |
| 10184173 | Plasma processing method | Takahiro Yonemoto, Yoshito Kamaji, Junya Sasaki | 2019-01-22 |