Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10490412 | Method for releasing sample and plasma processing apparatus using same | Masaki Ishiguro, Masahiro Sumiya, Tomoyuki Tamura, Kazuyuki Ikenaga | 2019-11-26 |
| 10395935 | Plasma processing apparatus and plasma processing method | Masaki Ishiguro, Masahiro Sumiya, Kazuyuki Ikenaga, Tomoyuki Tamura | 2019-08-27 |