Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10446395 | Self-aligned multiple patterning processes with layered mandrels | Jiehui Shu, Qiang Fang, Zhiguo Sun, Jinping Liu, Hui Zang | 2019-10-15 |
| 10192780 | Self-aligned multiple patterning processes using bi-layer mandrels and cuts formed with block masks | Jiehui Shu, Brendan O'Brien, Terry A. Spooner, Jinping Liu, Ravi Prakash Srivastava | 2019-01-29 |