Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| D851613 | Target profile for a physical vapor deposition chamber target | Kirankumar Neelasandra SAVANDAIAH, Anthony Chih-Tung Chan, Siew Kit Hoi, Prashant Prabhakar Prabhu | 2019-06-18 |
| 10283334 | Methods and apparatus for maintaining low non-uniformity over target life | Fuhong Zhang, Adolph Miller Allen, Yu Liu | 2019-05-07 |