Issued Patents 2019
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10438825 | Spectral reflectometry for in-situ process monitoring and control | Prateek Jain, Daniel Wack, Kevin Peterlinz, Andrei V. Shchegrov | 2019-10-08 |
| 10402941 | Guided image upsampling using bitmap tracing | James Klosowski | 2019-09-03 |
| 10281263 | Critical dimension measurements with gaseous adsorption | — | 2019-05-07 |
| 10215693 | Infrared spectroscopic reflectometer for measurement of high aspect ratio structures | David Y. Wang | 2019-02-26 |