Issued Patents 2019
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10381202 | Magnetron and magnetron sputtering device | Yujie Yang, Qiang Li, Guoqing Qiu, Zhimin BAI, Hougong Wang +1 more | 2019-08-13 |
| 10347470 | Process chamber and semiconductor processing apparatus | Feng Lv, Fenggang Zhang, Mengxin Zhao | 2019-07-09 |
| 10287686 | Hot plate and substrate processing equipment using the same | Mengxin Zhao, Xu Liu, Hougong Wang, Wei Xia, Lihui Wen | 2019-05-14 |