Issued Patents 2019
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10347470 | Process chamber and semiconductor processing apparatus | Feng Lv, Fenggang Zhang, Peijun Ding | 2019-07-09 |
| 10287686 | Hot plate and substrate processing equipment using the same | Xu Liu, Peijun Ding, Hougong Wang, Wei Xia, Lihui Wen | 2019-05-14 |
| 10273572 | Heating chamber and semiconductor processing apparatus | Qiang Jia | 2019-04-30 |