Issued Patents 2019
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10381202 | Magnetron and magnetron sputtering device | Yujie Yang, Qiang Li, Guoqing Qiu, Zhimin BAI, Hougong Wang +1 more | 2019-08-13 |
| 10347470 | Process chamber and semiconductor processing apparatus | Fenggang Zhang, Mengxin Zhao, Peijun Ding | 2019-07-09 |
| 10234217 | Nonmetal corrosion-resistant heat exchange device and plate-type heat exchanger having same | Song-Song Shao, Juyuan Tang, Guohui Shao | 2019-03-19 |