Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10381202 | Magnetron and magnetron sputtering device | Yujie Yang, Qiang Li, Guoqing Qiu, Zhimin BAI, Peijun Ding +1 more | 2019-08-13 |
| 10287686 | Hot plate and substrate processing equipment using the same | Mengxin Zhao, Xu Liu, Peijun Ding, Wei Xia, Lihui Wen | 2019-05-14 |