Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10216096 | Process-sensitive metrology systems and methods | Mark D. Smith, Sanjay Kapasi, Stilian Ivanov Pandev, Dzmitry Sanko, Pradeep Subrahmanyan +1 more | 2019-02-26 |
| 10209627 | Systems and methods for focus-sensitive metrology targets | Stewart Robertson, Mark D. Smith, Pradeep Subrahmanyan | 2019-02-19 |