Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10468292 | Shutter disk for physical vapor deposition chamber | Jason M. Schaller | 2019-11-05 |
| 10400328 | Physical vapor deposition system with a source of isotropic ion velocity distribution at the wafer surface | Daniel J. Hoffman, Ying Rui, John Pipitone | 2019-09-03 |