Issued Patents 2019
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10400328 | Physical vapor deposition system with a source of isotropic ion velocity distribution at the wafer surface | Karl M. Brown, Ying Rui, John Pipitone | 2019-09-03 |
| 10224186 | Plasma source device and methods | Scott Polak, Daniel Carter, Karen Peterson, Randy Grilly, Mike Thornton | 2019-03-05 |
| 10225919 | Projected plasma source | Daniel Carter, Karen Peterson, Randy Grilley | 2019-03-05 |